EE W247B

Introduction to MEMS Design

Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.

Units
 Estimated Workload: 12 hours/week
 Prerequisites: MAS-IC Students Only
Weekly Format:

~3 hrs lecture

~1hr discussion

~8 hrs work